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Selective plasma-induced deposition of fluorocarbon films on metal surfaces for actuation in microfluidics

✍ Scribed by P. Bayiati; A. Tserepi; E. Gogolides; K. Misiakos

Book ID: 121820448
Publisher: AVS (American Vacuum Society)
Year: 2004
Tongue: English
Weight: 334 KB
Volume: 22
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1764815

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