Selective etching in LiNbO3 combined of MeV O and Si ion implantation with wet-etch technique

✍ Scribed by Lei Wang; Ke-Ming Wang; Xue-Lin Wang; Feng Chen; Yi Jiang; Chuan-Lei Jia; Yang Jiao; Fei Lu; Ding-Yu Shen; Hong-Ji Ma; Rui Nie

• Book ID: 118501292
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 400 KB
• Volume: 201
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2006.07.145