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Selective area deposition of diamond on 4 in Si wafers

✍ Scribed by W. Hänni; C. Müller; M. Binggeli; H.E. Hintermann; P. Krebs; A. Grisel


Book ID
107864305
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
387 KB
Volume
236
Category
Article
ISSN
0040-6090

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