✦ LIBER ✦

Sealing industry analysis published

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 79 KB
Volume: 2010
Category: Article
ISSN: 1350-4789
DOI: 10.1016/s1350-4789(10)70348-2

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Sealing elements used in semiconductor production equipment face a unique set of challenges. These seals must perform under positive pressure and vacuum conditions, in harsh chemical environments and at extremely high temperatures. Most importantly, they must not deteriorate, or in any way introduce