Screening of metallization step coverage on integrated circuits : D. L. Crosthwait, Jr., P. B. Ghate and D. M. Smith. IEEE 11th Annual Proceedings Reliability Physics. 254 (1973)

• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 111 KB
• Volume: 13
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(74)90540-x