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Noncontact testing of interconnections in film integrated circuits using an electron beam : J. M. Sebeson, D. K. Hindermann, and W. L. Harrod. IEEE 11th Annual Proceedings Reliability Physics 1973, p. 138


Publisher
Elsevier Science
Year
1973
Tongue
English
Weight
104 KB
Volume
12
Category
Article
ISSN
0026-2714

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