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Scanning of surface acoustic wave phased array

✍ Scribed by C. Tsai; L. Nguyen

Book ID
126654603
Publisher
IEEE
Year
1974
Tongue
English
Weight
201 KB
Volume
62
Category
Article
ISSN
0018-9219

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We report on the investigation of surface acoustic wave (SAW) Ðelds by scanning acoustic force microscopy (SAFM), reaching submicron lateral resolution. The SAFM is based on a standard atomic force microscope and utilizes the non-linear force curve in the sense of a mechanical diode. The surface osc