Scanning Acoustic Force Microscope Investigations of Surface Acoustic Waves

✍ Scribed by Hesjedal, T.; Chilla, E.; Fr�hlich, H.-J.

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 578 KB
• Volume: 25
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(199706)25:7/8<569::aid-sia274>3.0.co;2-k

✦ Synopsis

We report on the investigation of surface acoustic wave (SAW) Ðelds by scanning acoustic force microscopy (SAFM), reaching submicron lateral resolution. The SAFM is based on a standard atomic force microscope and utilizes the non-linear force curve in the sense of a mechanical diode. The surface oscillation therefore leads to a shift of the cantileverÏs rest position. With SAFM we investigated SAW transducers operating at frequencies above 600 MHz. We measured the dynamic behaviour of the wave pattern within the transducers when sweeping the frequency and found a local inÑuence of mass loading on the standing SAW amplitude. Furthermore, the Ðrst images of SAW di †raction and scattering are shown.