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Scanning acoustic air microscope

✍ Scribed by T. Gudra; Z. Kojro; M. Schmachtl; C. Lier; M. Schubert; W. Grill

Book ID
103443179
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
667 KB
Volume
34
Category
Article
ISSN
0041-624X

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We report on the investigation of surface acoustic wave (SAW) Ðelds by scanning acoustic force microscopy (SAFM), reaching submicron lateral resolution. The SAFM is based on a standard atomic force microscope and utilizes the non-linear force curve in the sense of a mechanical diode. The surface osc