Scale dependence of micro/nano-friction and adhesion of MEMS/NEMS materials, coatings and lubricants

✍ Scribed by Tambe, Nikhil S; Bhushan, Bharat

• Book ID: 119976011
• Publisher: Institute of Physics
• Year: 2004
• Tongue: English
• Weight: 472 KB
• Volume: 15
• Category: Article
• ISSN: 0957-4484
• DOI: 10.1088/0957-4484/15/11/033