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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Friction, adhesion, and wear properties of PDMS coatings in MEMS devices

✍ Scribed by Penskiy, Ivan; Gerratt, Aaron P.; Bergbreiter, Sarah

Book ID: 121298261
Publisher: IEEE
Year: 2011
Weight: 752 KB
Category: Article
ISBN: 1424496322
DOI: 10.1109/MEMSYS.2011.5734456

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