The technology of obtammg thm AIN plezoelectrlc films on a glass substrate by means of a reactive r f magnetron sputtermg method IS consldered For obtammg polycrystallme orlented films with perfect crystalhzatlon, It IS necessary to have certam technologtcal conchtlons for their growth The prospects
SAW sensors
β Scribed by W. Buff
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 365 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0924-4247
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A finite element method (FEM) simulation approach of surface acoustic wave (SAW) organic vapor sensors was investigated. The effects of the polymer coating on the propagation characteristics of the SAW were studied by FEM modeling in the absence and presence of vapor. The sensitivities for each vapo
A surface acoustic wave (SAW) device has been used as a chemical vapour sensor by coating phosphatidylethanolamine (PE) on to the device surface as an appropriate adsorptive coating. The characteristics of a PE-coated SAW resonator operating at 310 MHz. and capable of detecting chemical vapours. suc