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AlN films for SAW sensors

โœ Scribed by M.A. Odintzov; N.I. Sushentzov; T.L. Kudryavtzev

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
260 KB
Volume
28
Category
Article
ISSN
0924-4247

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โœฆ Synopsis

The technology of obtammg thm AIN plezoelectrlc films on a glass substrate by means of a reactive r f magnetron sputtermg method IS consldered For obtammg polycrystallme orlented films with perfect crystalhzatlon, It IS necessary to have certam technologtcal conchtlons for their growth The prospects of usmg these films m SAW sensors are chscussed An example IS given of a SAW temperature sensor implemented on the basis of an AIN film on a glass substrate

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AlN on polysilicon piezoelectric cantile
AlN on polysilicon piezoelectric cantilevers for sensors/actuators
โœ C. Giordano; I. Ingrosso; M.T. Todaro; G. Maruccio; S. De Guido; R. Cingolani; A ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 576 KB

In this work, we report on the fabrication and characterization of aluminium nitride (AlN)-based piezoelectric cantilevers to be applied both as pressure/force or inertial sensors and as microactuators. The fabricated structures exploiting a piezoelectric AlN thin film embedded between two molybdenu