Sample preparation of biological tissues for infrared spectroscopy using frustrated multiple internal reflectance

Infrared Study of Hydrogen in Ultra-Thin

Infrared Study of Hydrogen in Ultra-Thin Silicon Nitride Films Using Multiple Internal Reflection Spectroscopy (MIR) in 200 mm Silicon Wafers

✍ Olivier, M. ;Martin, F. ;Chabli, A. ;Lefeuvre, G. ;Conne, F. ;Rochat, N. 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 191 KB 👁 2 views

We discuss the usefulness of the two-prism coupling geometry to perform non-destructive multiple internal reflection (MIR) measurements on 200 mm silicon wafers. Application to the determination of the Si±H and N±H bond concentrations in LPCVD SiN ultra-thin films, is presented. It is shown that an