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Sample Preparation methodology for ultra thin oxide damage in Metal–Insulator–Metal capacitors

✍ Scribed by Giancarlo Calvagno; Giuseppe Muni; Andrea Jossa; Domenico Mello

Book ID
119326732
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
888 KB
Volume
52
Category
Article
ISSN
0026-2714

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