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S2 F10 Formation in Computer Simulation Studies of the Breakdown of SF6

โœ Scribed by Herron, J.T.

Book ID
114622119
Publisher
IEEE
Year
1987
Tongue
English
Weight
388 KB
Volume
EI-22
Category
Article
ISSN
0018-9367

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A critical review of the chemical kineti
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โœ John T. Herron ๐Ÿ“‚ Article ๐Ÿ“… 1987 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 748 KB

The gas phase chemical kinetics of SF,, SF5, and SLF,, are reviewed with particular emphasis on relevance to the general problem of the dielectric breakdown of SFs. Specific reaction systems treated are SF, + F,, SF, + SF,, and the pyrolysis of S2Flo. Computer modeling calculations were carried out