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A critical review of the chemical kinetics of SF4, SF5, and S2F10 in the gas phase

✍ Scribed by John T. Herron

Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
748 KB
Volume
19
Category
Article
ISSN
0538-8066

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✦ Synopsis

The gas phase chemical kinetics of SF,, SF5, and SLF,, are reviewed with particular emphasis on relevance to the general problem of the dielectric breakdown of SFs. Specific reaction systems treated are SF, + F,, SF, + SF,, and the pyrolysis of S2Flo. Computer modeling calculations were carried out to arrive at the best estimates of rate parameters. Based on the results of these calculations, sets of recommended rate parameters are provided, The major discrepancies and problems in establishing the kinetic data base are described. Thermochemical consequences of different model calculations are given.

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