Rutherford backscattering studies of surface density reduction in ion-implanted and excimer-laser-annealed Ge

✍ Scribed by Shanalyn Kiger; A. Compaan; J.S. Eck

• Book ID: 107814630
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 654 KB
• Volume: 48
• Category: Article
• ISSN: 0022-3697
• DOI: 10.1016/0022-3697(87)90018-7