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Roughness of amorphous, polycrystalline and hemispherical-grained silicon films

โœ Scribed by Novak, A. V.; Novak, V. R.

Book ID
121607539
Publisher
SP MAIK Nauka/Interperiodica
Year
2013
Tongue
English
Weight
268 KB
Volume
39
Category
Article
ISSN
1063-7850

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