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Modeling of the depletion of the amorphous-silicon surface during hemispherical grained silicon formation

✍ Scribed by Sallese, J. M.; Ils, A.; Bouvet, D.; Fazan, P.; Merritt, Chris

Book ID: 121687590
Publisher: American Institute of Physics
Year: 2000
Tongue: English
Weight: 460 KB
Volume: 88
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1321024

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