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Rotation Speed-Induced Uniaxial In-Plane Anisotropy in Thin Films Deposited Onto a Rotating Substrate

โœ Scribed by Hakan Kockar


Book ID
111594756
Publisher
Springer
Year
2004
Tongue
English
Weight
157 KB
Volume
17
Category
Article
ISSN
0896-1107

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Modeling of substrate-induced anisotropy
โœ Jeong B. Lee; Mark G. Allen; Thomas C. Hodge; Sue Ann Bidstrup; Paul A. Kohl ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 551 KB

Polymeric thin films are widely used in microelectronic applications for a variety of purposes. These films may possess completely isotropic material properties and yet still exhibit anisotropic effects due to the constraining influence of the substrate coupling into the film behavior via the film P