Modeling of substrate-induced anisotropy
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Jeong B. Lee; Mark G. Allen; Thomas C. Hodge; Sue Ann Bidstrup; Paul A. Kohl
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Article
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1996
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John Wiley and Sons
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English
โ 551 KB
Polymeric thin films are widely used in microelectronic applications for a variety of purposes. These films may possess completely isotropic material properties and yet still exhibit anisotropic effects due to the constraining influence of the substrate coupling into the film behavior via the film P