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Room temperature growth of semipolar AlN (102) films on ZnO (102) substrates by pulsed laser deposition

โœ Scribed by Kohei Ueno; Atsushi Kobayashi; Jitsuo Ohta; Hiroshi Fujioka; Hidetaka Amanai; Satoru Nagao; Hideyoshi Horie


Book ID
112182777
Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
426 KB
Volume
3
Category
Article
ISSN
1862-6254

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Epitaxial growth of ZnO thin films on Al
โœ Rahmane, S. ;Abdallah, B. ;Soussou, A. ;Gautron, E. ;Jouan, P.-Y. ;Le Brizoual, ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 465 KB

## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al