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Influences of repetition rate of laser pulses on growth of crystalline AlN films on sapphire(0001) substrates by pulsed laser deposition

✍ Scribed by Sumitani, Kazushi; Ohtani, Ryota; Yoshida, Tomohiro; Nakagawa, You; Mohri, Satoshi; Yoshitake, Tsuyoshi

Book ID: 122986507
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 308 KB
Volume: 19
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2009.12.004

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