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Room-temperature electroluminescence from H-plasma-implanted silicon

✍ Scribed by Liu, Weili; Kwok, Sunny C H; Fu, Ricky K Y; Chu, Paul K; Hung, T F; Xu, Zhengkui; Lin, Chenglu; Li, K F; Tam, H L; Cheah, K W

Book ID
126845995
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
239 KB
Volume
18
Category
Article
ISSN
0268-1242

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Electroluminescence in plasma ion implan
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## Abstract Electroluminescent silicon is very desirable for its potential applications in computing and telecommunications. Plasma Ion Implantation (PII) is a means to modify the surface and sub‐surface properties of silicon to produce luminescent centres. Silicon to be treated with PII is immerse