Room-temperature deposition of transparent conductive Al-doped ZnO thin films using low energy ion bombardment

✍ Scribed by C. G. Jin; T. Yu; Z. F. Wu; F. Wang; M. Z. Wu; Y. Y. Wang; Y. M. Yu; L. J. Zhuge; X. M. Wu

• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 775 KB
• Volume: 106
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-011-6722-4