Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressure

✍ Scribed by Deok Kyu Kim; Hong Bae Kim

• Book ID: 116607519
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 860 KB
• Volume: 509
• Category: Article
• ISSN: 0925-8388
• DOI: 10.1016/j.jallcom.2010.09.047