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Room temperature defect diffusion in ion implanted c-Si

✍ Scribed by Sebania Libertino; Salvatore Coffa; Antonino La Magna

Book ID: 114165141
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 144 KB
Volume: 186
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)00854-0

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