Room temperature anodic plasma oxidation of tantalum silicide: Oxide composition and electrical properties
✍ Scribed by A. Climent; J. Perrière; A. Laurent; B. Lavernhe; R. Pérez-Casero; J.M. Martínez-Duart
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 409 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0169-4332
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