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Room temperature anodic plasma oxidation of tantalum silicide: Oxide composition and electrical properties

✍ Scribed by A. Climent; J. Perrière; A. Laurent; B. Lavernhe; R. Pérez-Casero; J.M. Martínez-Duart


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
409 KB
Volume
38
Category
Article
ISSN
0169-4332

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