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Role of secondary electrons and metastable atoms in the electron-beam activation of argon-silane mixtures

✍ Scribed by G. I. Sukhinin; A. V. Fedoseev; S. Ya. Khmel’

Book ID: 111442941
Publisher: SP MAIK Nauka/Interperiodica
Year: 2008
Tongue: English
Weight: 349 KB
Volume: 34
Category: Article
ISSN: 1063-780X
DOI: 10.1134/s1063780x08010078

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