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Role of ion/surface interactions in nucleation kinetics and elemental incorporation probabilities during film growth from the vapour phase : J E Greene, Department of Materials Science, University of Illinois, 1101 W Springfield Ave, Urbana, Illinois 61801, USA

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
130 KB
Volume
38
Category
Article
ISSN
0042-207X

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