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Role of charge particles irradiation on the deposition of AlN films using plasma focus device

โœ Scribed by I.A. Khan; R.S. Rawat; R. Verma; G. Macharaga; R. Ahmad


Book ID
108166303
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
692 KB
Volume
317
Category
Article
ISSN
0022-0248

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