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Rigorous electromagnetic simulation of EUV masks: influence of the absorber properties

✍ Scribed by Patrick Schiavone; Gérard Granet; J.Y. Robic

Book ID
114155281
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
234 KB
Volume
57-58
Category
Article
ISSN
0167-9317

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