Benchmarking of available rigorous electromagnetic field (EMF) simulators for phase-shift mask applications

✍ Scribed by Christian K Kalus; Steffen List; Andreas Erdmann; Ron Gordon; Martin McCallum; Armin Semmler

• Book ID: 114155254
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 743 KB
• Volume: 57-58
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00438-5