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Rigidity controllable polishing tool based on magnetorheological effect

✍ Scribed by Wang, Jia (author);Wan, Yongjian (author);Shi, Chunyan (author)

Book ID
120288261
Publisher
SPIE
Year
2012
Weight
174 KB
Volume
8416
Category
Article
ISBN
0819490989
ISSN
0277-786X

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## Abstract In this paper, a novel polishing method using magnetorheological (MR) fluid is presented in order to improve conductor‐surface roughness and achieve high‐frequency performance of the electroplated three‐dimensional (3D) CPW, where the MR fluid is utilized to efficiently polish uneven an