✦ LIBER ✦
Rigid conformal polishing tool using non-linear visco-elastic effect
✍ Scribed by Kim, Dae Wook; Burge, James H.
- Book ID
- 115412710
- Publisher
- Optical Society of America
- Year
- 2010
- Tongue
- English
- Weight
- 861 KB
- Volume
- 18
- Category
- Article
- ISSN
- 1094-4087
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