𝔖 Bobbio Scriptorium
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Right-angle slot waveguide bends with high bending efficiency

✍ Scribed by Ma, Changbao; Zhang, Qun; Van Keuren, Edward


Book ID
115409791
Publisher
Optical Society of America
Year
2008
Tongue
English
Weight
294 KB
Volume
16
Category
Article
ISSN
1094-4087

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## Abstract A technique to fabricate high‐resolution, photonic features in selected areas aligned to large features such as waveguides, sources, or detectors without e‐beam lithography is demonstrated. This low‐cost parallel technique can be readily extended to produce resonant cavities and photoni