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Rheed studies and interface analysis of GaAs grown on Si(001)

โœ Scribed by K. Woodbridge; J.P. Gowers; P.F. Fewster; J.H. Neave; B.A. Joyce

Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
185 KB
Volume
81
Category
Article
ISSN
0022-0248

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The composition-depth profile studies using x-ray photoelectron spectroscopy (XPS) are carried out for Mn thin films grown on GaAs(001) substrates at different substrate temperatures. The experimental results show that due to the interdiffusion and chemical reaction, an Mn-Ga-As mixed layer is forme