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Rf-sputtering growth of stoichiometric amorphous TeO2 thin films

✍ Scribed by M. Di Giulio; A. Zappettini; L. Nasi; S. M. Pietralunga

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 146 KB
Volume: 40
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.200410479

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