RF sputter deposition of poly(tetrafluoroethylene) films as masking materials for silicon micromachining

Characterization of Nb-doped Pb(Zr,Ti)O3

Characterization of Nb-doped Pb(Zr,Ti)O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications

✍ Takamichi Fujii; Yoshikazu Hishinuma; Tsuyoshi Mita; Takayuki Naono 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 583 KB

Piezoelectric Nb-doped Pb(Zr,Ti)O 3 thin films (PNZT) were deposited on stainless steel and silicon wafer substrates using RF-magnetron sputtering with the aim of micro-electromechanical systems (MEMS) applications. The obtained films on both kinds of substrates were strongly uniaxially oriented, fo