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R.F.-plasma system for the production of ultrafine, ultrapure silicon carbide powder

✍ Scribed by C. M. Hollabaugh; D. E. Hull; L. R. Newkirk; J. J. Petrovic


Publisher
Springer
Year
1983
Tongue
English
Weight
727 KB
Volume
18
Category
Article
ISSN
0022-2461

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