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Rf oscillations in dc planar sputtering magnetrons: A G Spencer and R P Howson, Vacuum, 38, 1988, 497–498.

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 311 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90329-1

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📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 246 KB