Surface-micromachined RF MEMs switches o
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Daniel Hyman; Juan Lam; Brett Warneke; Adele Schmitz; T. Y. Hsu; Julia Brown; Ja
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Article
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1999
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John Wiley and Sons
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English
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This paper reports on the development of a broadband, low insertion loss, ohmic-contact MEMs switch for microwave and millimeter-wave applications. The switch is surface-micromachined and electrostatically-actuated with electromechanical performance simulated with analytical and numerical models tha