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RF MEMS membrane switches on GaAs substrates for X-band applications

โœ Scribed by Wei-Bin Zheng, ; Qing-An Huang, ; Xiao-Ping Liao, ; Fu-Xiao Li,


Book ID
121792001
Publisher
IEEE
Year
2005
Tongue
English
Weight
806 KB
Volume
14
Category
Article
ISSN
1057-7157

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๐Ÿ“œ SIMILAR VOLUMES


Surface-micromachined RF MEMs switches o
โœ Daniel Hyman; Juan Lam; Brett Warneke; Adele Schmitz; T. Y. Hsu; Julia Brown; Ja ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 505 KB

This paper reports on the development of a broadband, low insertion loss, ohmic-contact MEMs switch for microwave and millimeter-wave applications. The switch is surface-micromachined and electrostatically-actuated with electromechanical performance simulated with analytical and numerical models tha