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K-band capacitive MEMS switches on GaAs substrate: Design, fabrication, and reliability

✍ Scribed by A. Persano; A. Tazzoli; P. Farinelli; G. Meneghesso; P. Siciliano; F. Quaranta

Book ID: 119326666
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 783 KB
Volume: 52
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2012.06.008

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