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RETRACTED: Microstructural study of composite C–Cu films deposited by dc magnetron sputtering

✍ Scribed by A.A. Onoprienko; N.I. Danilenko; I.A. Kossko; V.F. Gorban

Book ID
108278356
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
569 KB
Volume
202
Category
Article
ISSN
0257-8972

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TiN/amorphous carbon (a-C) composite films were deposited onto steel substrate by DC magnetron sputtering with different ratios of graphite to Ti in target and at a substrate temperature of 200 • C. The hardness, composition, morphology and microstructure of the composite films were characterized by