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Results from 2 years of operation of a plasma implantation facility

✍ Scribed by R.J Adler; W Horne; R Brunke; J.T Scheuer

Book ID: 108422821
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 63 KB
Volume: 136
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(00)01025-2

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