Design characteristics of a 100 kV, 100 kW plasma ion implantation facility

✍ Scribed by J.N. Matossian; D.M. Goebel

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 802 KB
• Volume: 85
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(96)02874-5