Improved Responsivity of AlGaN-Based Res
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Yonemaru, M. ;Kikuchi, A. ;Kishino, K.
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Article
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2002
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John Wiley and Sons
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English
โ 89 KB
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AlGaN-based resonant cavity-enhanced ultraviolet metal-semiconductor-metal photodetectors (PDs) were grown on sapphire substrates without metalorganic chemical vapor deposition (MOCVD)-grown GaN templates by radio frequency plasma-assisted molecular beam epitaxy (RF-MBE). In the resonant cavity-enha