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Resonance microwave volume plasma source

✍ Scribed by N. K. Berezhetskaya; V. A. Kop’ev; I. A. Kossyi; N. I. Malykh; M. A. Misakyan; M. I. Taktakishvili; S. M. Temchin; Young Dong Lee


Book ID
111442889
Publisher
SP MAIK Nauka/Interperiodica
Year
2007
Tongue
English
Weight
460 KB
Volume
33
Category
Article
ISSN
1063-780X

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