Resonance frequency and quality factor tuning in electrostatic actuation of nanoelectromechanical systems

✍ Scribed by Dong Hwan Kim

• Publisher: Springer-Verlag
• Year: 2005
• Tongue: English
• Weight: 361 KB
• Volume: 19
• Category: Article
• ISSN: 1738-494X
• DOI: 10.1007/bf02984183