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Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid

✍ Scribed by Tomás Manzaneque; J. Hernando; L. Rodríguez-Aragón; A. Ababneh; H. Seidel; U. Schmid; J. L. Sánchez-Rojas

Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
387 KB
Volume
16
Category
Article
ISSN
0946-7076

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